可变形反射镜-瞬渺光电 >> CILAS

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可变形反射镜(Deformable_Mirror)是自适应光学系统中的核心部件之一，它担负着校正由内、外因素引人的波前误差的任务，并补偿由光路中各种因素引起的成像质量降低的问题，即校正器。按照驱动方式的不同，可变形反射镜分为：(1)压电式；(2)电磁式；(3)电致伸缩式；(4)液压式；

荷兰OKO公司的MEMS薄膜变形镜采用MEMS技术制造，为静电驱动的连续镜面变形镜，具有体积小、成本低、响应快以及集成度高等传统变形镜不具备的特点。可应用于包括激光光束控制、腔内激光控制、实时大气校正、全息、光通信等领域。镜面以铝膜为标准反射膜，用户也可以定制其他金属膜或多层介质反射膜。MEMS变形镜的全幅度的响应快于150μs，由于受限于电子系统，响应时间一般在1ms，可提供动态波前畸变校正。

MEMS薄膜变形镜主要特点：

零滞后，可以工作在1kHz的频率范围; 校正范围大，变形量可达25μm; 成本低；小而轻；功率消耗小；高镜面质量

产品规格表

口径/单元	校正量/ 单校正量	扰动/像差校正	激光束校正	磁滞
15mm/ 37ch	9000nm / 500 nm	Excellent up to 0.75 m aperture	Good to moderate up to 100W with a special coating	忽略
30mm/39ch, 59ch, 79ch	12000nm/ 600 nm	Excellent up to 1.5 m aperture	Good to moderate up to 150W with a special coating	忽略
40mm,50mm/ 59ch ,79ch	18000nm/ 700 nm	Excellent up to 1.5 m aperture	Good to moderate up to 200W with a special coating	忽略

经典型号技术规格: MMDM30-39/59/79

孔径形状 : Approximately circular

口径 : 30mm diameter

电极数: 39/59/79

控制电压: 150 to 300 V, dependent on the mirror

相对参考面的初始RMS值: less than 0.9um

主要的初始像差: Astigmatism

镜面中心最大倾斜: 9um

重量: 500 g

库存清单

1. MMDM (Micromachined Membrane Deformable Mirror)

All mirrors include a matching set of multichannel electronic drivers (excluding computer interface).

Ø MMDM 10mm 1ch defocus corrector incl HV amplifier (A4MEMS)

Ø MMDM 15mm 37ch Al-coated

Ø MMDM 30mm 39ch Al-coated

Ø MMDM 30mm 59ch Al-coated

Ø MMDM 30mm 79ch Al-coated

Ø MMDM 40mm 59ch Al-coated

Ø MMDM 40mm 79ch Al-coated

Ø MMDM 50mm 79ch Al-coated

The lead time for deformable mirrors is 4 to 24 weeks. Special coatings should be quoted and ordered separately.

2. PDM (Piezoelectric Deformable Mirror)

All mirrors include a matching set of multichannel electronic drivers (excluding computer interface).

Ø PDM 30mm 19ch protected silver or Al coated

Ø PDM 30mm 19ch for correction of low-order aberrations, protected silver or Al coated

Ø PDM 30mm 37ch protected silver or Al coated

Ø PDM 50mm 109ch Al coated

Ø PDM 50mm 37ch protected silver or Al coated

Ø PDM 50mm 37ch, high power thermally stabilized excluding coating

Ø PDM 50mm 79ch Al coated

The lead time for deformable mirrors is 4 to 24 weeks. Special coatings should be quoted and ordered separately.

3. DAC units for computer interface of DM

Ø 24ch PCI DAC board

Ø 40ch USB DAC driver module

4. Wavefront sensors and adaptive optics feedback

Ø Calibrated FrontSurfer wavefront sensor incl. 1/2 inch CCD or CMOS camera and standard microlens array

Ø FrontSurfer WF Sensor software (AO feedback disabled)

Ø FrontSurfer WF Sensor software (AO feedback enabled)

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法国CILAS压电式变形镜

CILAS的可变形反射镜，利用压电材料所有共享相同的属性（PZT）来工作的。他可以精确地控制很小的变形量（亚纳米级）和高响应速度（几百微秒）。

CILAS的可变形反射镜