WCT-IL800 System Capabilities
Primary application:
Step-by-step monitoring and optimization of the production line, using measurements on product wafers at key stages in the process.
Example applications:
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Integration Overview
We welcome inquiries from automation vendors who require a reliable and cost-effective inline lifetime measurement, with professional support and training. We also work directly with R&D and other small fabs and their choice of automation supplier to integrate the WCT-IL800 into any metrology workstation.
The standard operating software has allowances for rapid prototyping and testing upon delivery. In the automated mode, the software client
offers vital wafer results to a server database,
using options such as a local OPC server or
Profibus interface. Sinton Instruments’ characteristic reports of minority-carrier dependent lifetime are also standard.
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Monitoring incoming wafer quality (lifetime, sheet resistance, and trapping)
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Monitoring phosphorus diffusion quality
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Early detection of wafer contamination from water, chemicals, furnaces, or wafer handling during the process |
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Maintaining optimal surface passivation quality from the nitride deposition
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