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四探针电阻值测试系统

CDE Resmap 系统满足你所有的需求。 不管是在研究实验室还是需要高净化要求的半导体生产车,它都可以完成连续24/7片从低到高,多数量连续测试的需求。不论你是在化学研磨抛光(CMP),扩散,离子注入部门,或者在导电薄膜研究, CDE的 RESMAP 系统可以满足您工艺上和测量需求发展上甚至是预算方面的要求。

Resmap系统提供的是准确、可重复使用的,快速、持久、先进的测量设备。如今,全新的多探针测试系统 Resmap 400系列为您提供功能最全面,性价比最高的测量设备

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Fast, accurate, versatile . . .
ResMap systems deliver advanced metrology that is accurate, repeatable, fast and affordable. The new multi-probe capabilities of the 400-Series of ResMap systems make them the most versatile, cost-effective metrology systems available today.

(Please click on the ResMap model numbers below for individual model specifications.)

For a comparison chart of standard ResMap systems, please click here.

For information regarding solar ResMap systems, please click here.

For information regarding third-party used ResMap systems, please click here.

ResMap 168

168
  • Auto- loading cassette
    • 4" - 8" wafer auto load
    • 2" - 8" wafer manual load

     

  • Table top model
  • Fast measurement time
  • Wide variety of mapping patterns

ResMap 463-FOUP

463FOUP
  • 300mm wafer FOUP
  • Dual or quad probe changer
  • Adaptor for 300mm & 200mm cassette
  • Stand-alone system
  • Mini-environment

ResMap 273

273
  • 300mm wafer capability
    • 2" - 12" wafer manual load
  • Table top model
  • Fast measurement time
  • Wide variety of mapping patterns

ResMap 463-OC

463-OC
  • 300mm wafer auto load
    • 200mm, 150mm options
    • Manual load any size
  • Dual or quad probe changer
  • Stand-alone system
  • Wide variety of mapping patterns

ResMap 178

178
  • 200mm wafer capability
    • 2" - 8" wafer manual load
  • Table top model
  • Fast measurement time
  • Wide variety of mapping patterns

ResMap 468-SMIF

468SMIF
  • 200mm wafer SMIF
  • Dual or quad probe changer
  • Mini-environment
  • Stand-alone system
  • Wide variety of mapping patterns

 

CDE ResMap 四点探针 (ResMap 178)4探针测试系统(电阻率,面电阻)  
CDE ResMap 四点探针 (ResMap 178)4探针测试系统(电阻率,面电阻)
CDE ResMap 四点探针 (ResMap 178) CDE 提供自动计算机量测的四点探针阻值量测机台。快速,精确与软件控制下针、软件功能可最佳化下针压力,即使薄片量测也不易破裂。自动清针(Probe Conditioning);动作,双针头切换。太阳能使用可支持自动Loader,300mm 机台可使用Front End,最多扩充3个量测单元,支持Semi标准接口。